Design, development and verification of measurement and control system aimed for high-power multi-output plasma power generators intended for PVD and PECVD processes. Enables outputs number modification during operation (through configuration registers) as well as at compilation stage (through implementation parameters – for resource usage reduction). The designed architecture supports multiple devices (with any number of outputs) connection for synchronization and cooperation.
| Languages | VHDL, Tcl/Tk |
| Tools | ModelSim, Quartus Prime |
| Target | Intel Cyclone V |
| Time frame | 10.2016 – 09.2019 |
| Commercial | ✔ |
| Collaboration | TRUMPF Huettinger |
Basic information
Generated waveform parameters (pulse width, frequency, amplitude, etc.) can be updated on the fly – whether a single generator or a multiple number of synchronized devices are used.
A generator output number is a maximum number of independent waveform generated ad the same time using a single physical device with separate electrodes. From the user standpoint, X output generator behaves like X separate generators encased in a single device.
Multi-output device (with more than 1 physical output) can be reconfigured to a single-output device in one of two ways:
- Update configuration registers’ values – no recompilation required
- Update implementation parameters and recompile the design – for reduced resource usage
Depending on the actual configuration, the control system’s parameters are automatically set and configured for expected behavior – including output control signals and measurements.
Based on the designed system architecture, at least 4 separate products (2 of which in multiple configurations) have been produced in a number of copies.
Selected features of the implemented system architecture
- Single FPGA project supporting multiple separate devices/products (with a number of different configurations)
- Multiple types of output signals control
- Simple way to modify the required outputs number
- Option to reconfigure any multi-output device into a single-output device
- Support for multiple separate devices connection
My responsibilities
- Comprehensive system architecture redesign for configurable multi-output support and flexible synchronization and cooperation features
- Multiple physical device configurations support implementation
- Additional work modes implementation
- Measurements preprocessing based on selected configuration
- Development of the output control signals block
- Output power modulation feature
- Minor features implementation
- Maintenance & debugging
